Plenary Speakers

Mokrane Boudaoud Institut des Systèmes Intelligents et de Robotique – ISIR Sorbonne University FRANCE

Advances in robotics and control for correlative in situ AFM-in-SEM microscopy

This presentation addresses control and robotics challenges in correlative microscopy through multi-DOF atomic force microscopy (AFM)-based robotic systems operating in conjunction with a scanning electron microscope (SEM). In particular, the presentation will cover methods for multiscale control of AFM probes in three-dimensional space, SEM-based visual servoing strategies for advanced AFM graphical user interfaces, calibration approach for microrobotic systems based on AFM and SEM data, and methods for in situ critical dimension metrology of microstructures exploiting the rotational capabilities of multi-DOF AFM-in-SEM systems.