Mohammad Al JanaidehSchool of Engineering, University of Guelph, Ontario
Department of Mechanical and Mechatronics Engineering,
Memorial University, Newfoundland
On the Control of Smart Micro/Nano Positioning Systems with High Nonlinearities
Piezoelectric actuators are used in many novel precision applications. Nevertheless, nonlinearities limit piezoelectric actuator accuracy. Controlling generic dynamic micro- and nano-positioning systems with nonsmooth nonlinearities encourages basic study. Hysteresis, blowback, and creep illustrate. New industrial control systems, from semiconductor micromanipulation to electro-hydraulic positioning systems and robot manipulators, have these nonlinearities. Novel control approaches for smart micro/nano positioning systems in precision motion systems under high nonlinearities will be discussed.