National Institute of Standards (NIST)
High Frequency Metrology at Small Scales
We will present our recent review of measurement techniques for characterization of advanced materials and devices at small scales in the RF and microwave frequency range. The talk will address some aspects of extreme impedance measurements that are relevant to correct characterization of electronic devices at small scales due to significant impedance mismatch with the existing measurement systems operating usually with 50 Ohm reference impedance. We will discuss also the application of scanning microwave microscopy as an emerging complementary measurement technique with nanometer scale spatial resolution and potential implications of such metrology for the nanorobotics.