Ning Xi Advanced Technologies Institute Head, Department of Data and Systems Engineering University of Hong Kong HONG KONG, S.A.R. CHINA

Nano robots enabled manufacturing systems

Nanomanufacturing technology has been playing a critical role in the development of nanotechnology, thus enabling us to build devices enormously smaller than before and with superb performance and functionalities. These will bring fundamental changes to the disciplines including engineering, chemistry, medicine, biology and physics.  The research on nanomanufacturing tools and processes is tremendously important due to the fact that most physical magnitudes characterizing nano scale systems significantly differ from those that are familiar in macro, meso, and micro systems. In this presentation, the theoretical foundations as well as the implementation schemes for the development of integrated nanomanufacturing systems will be discussed.  The topics will include nano robotic tools for manipulation and assembly, as well as nano device packaging and testing. The examples of manufacturing nano sensors and electronic devices such as Carbon Nanotube based infrared sensors will be presented. In addition, the applications of nanomanufacturing technology in semiconductor industry such as wafer inspection and mask repairing will also be discussed.