MARSS2019-Helsinki-Li

Tie Li

Professor
Shanghai Institute of Microsystem and Information Technology (SIMIT)
Chinese Academy of Sciences (CAS)
Shanghai
CHINA

From nano fabrication to nano sensors by MEMS technology

As origin of information in real world, high performance sensors are important not only to our human beings but also to smart robotics. Nano-structured materials have made it possible to form sensors at ultra-high performance. However, mass production at low cost is always desirable but not achieved in current time. In this talk, we will review our work of design and fabrication of nano structures in wafer level by MEMS technology, its integration with micro transceivers and the corresponding high-performance nano sensors. With highly selective CMOS techniques, silicon nanowires (SiNWs) with narrow width (~20nm) were top-down fabricated on silicon-on-insulator (SOI) wafer, which is very useful to a simple, portable and rapid detection platform for bio/chemical detection. While, with the integration between micro-hotplate and nano-ordered sensing materials, gas sensor chips can be produced with high sensitivity, fast response time, and low power consumption. The proposed work represents a versatile approach for wide application of wafer-level fabricated sensors with high performance.