Yves Bellouard

Galatea lab
Ecole Polytechnique Fédérale de Lausanne
Microcity, Neuchâtel, SWITZERLAND

Three dimensional femtosecond laser processing: an enabling technology for microrobotics and micromanipulation

In this talk, we will show how femtosecond laser processing can be used, not only for creating true three-dimensional high-aspect ratio micromechanical devices as well as transparent actuators, but also for permanent repositioning of elements with sub-nanometer resolutions.